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Materials science
Making wafer-scale 2D semiconductors
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This video article highlights the recent works by Prof. Kaihui Liu’s group at Peking University in making wafer-scale 2D semiconductor thin films. In contrast to conventional epitaxial surface growth methods, they have developed two novel epitaxial interface growth methods, which have enabled them to make various 2D semiconductors in wafer scale for device fabrication. As exemplified in this video highlight, using the novel interfacial lattice-epitaxy growth method, they have successfully made single-crystal 4-cm wafers of MoS2, with a thickness ranging from 1 to ~1500 layers, of high crystallinity and uniformity. Furthermore, they fabricated mono-, bi-, and tri-layer MoS2 transistors, whose electrical performance exceeds the IRDS 2028 mobility target. Also, using the interfacial solid-liquid-solid growth method, they have made single-phase single-crystal 5-cm wafers of InSe multilayer films and fabricated integrated circuits of transistor arrays with a performance matrix surpassing the Si Intel 3nm technology.

Keywords:
interfacial lattice-epitaxy
interfacial solid-liquid-solid growth
2D semiconductor wafers
DOI: https://doi.org/10.61109/cs.202601.152
Submitted
28 October, 2025
Accepted
16 December, 2025
Published
05 January, 2026
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Open Access This video article (including but not limited to the video presentation, related slides, images and text manuscript) is licensed under a Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits use, duplication, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
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F. Liu, Making wafer-scale 2D semiconductors, Coshare Science 04, 01 (2026).
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